Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs

doi:10.1002/sia.7106

	Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs
	Wen, Xinyu 1,2; Lai, Zhenguo 1,3; Zhang, Bin 1; Wang, Xin 4; Wang, Yuan Yuan 5; Gao, Kaixiong 1; Tao, Caihong 2
	2022-09
发表期刊	Surface and Interface Analysis
ISSN	0142-2421
卷号	54 期号:9 页码:933-943
摘要	In this study, we prepared a-C:H films with different nanostructures at different methane flow rates. The effect of the methane flow rate on the tribological properties of 440 steel/a-C:H friction pairs and a-C:H:Ti/a-C:H friction pairs in an atmospheric environment was studied by a reciprocating friction machine. The results show that there is no relationship between the tribological properties of 440 steel/a-C:H friction pair and methane flow rate. The tribological performance of the a-C:H:Ti/a-C:H friction pair was greatly improved. In particular, in the friction pair of a-C:H:Ti/a-C:H with a methane flow rate of 20 sccm, superlubricity is shown, and the wear rate is only 4.04 × 10−9 mm3/Nm. After tribological experiments, Raman spectroscopy, XPS, and other characterization methods were used to study the relationship between the nanostructure and tribological properties of a-C:H:Ti films and a-C:H prepared with different methane flow rates. This study is great significance to the application of a-C:H:Ti/a-C:H friction pair in mechanical parts under atmospheric environment. © 2022 John Wiley & Sons Ltd.
关键词	Amorphous carbon Amorphous films Carbon films Film preparation Flow rate Hydrogenation Methanation Methane Nanostructures Tribology Atmospheric environment DLC/DLC pair Friction pair Graphite target Hydrogenated amorphous carbon films Hydrogenated carbon Hydrogenated carbon ball Magnetron-sputtering Methane flow Tribological properties
DOI	10.1002/sia.7106
收录类别	EI ; SCIE
语种	英语
WOS研究方向	Chemistry
WOS类目	Chemistry, Physical
WOS记录号	WOS:000790298400001
出版者	John Wiley and Sons Ltd
EI入藏号	20221912070591
EI主题词	Friction
EI分类号	631 Fluid Flow ; 761 Nanotechnology ; 802.2 Chemical Reactions ; 804.1 Organic Compounds ; 813.2 Coating Materials ; 931 Classical Physics ; Quantum Theory ; Relativity ; 933 Solid State Physics ; 933.2 Amorphous Solids ; 943.2 Mechanical Variables Measurements
来源库	WOS
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	https://ir.lut.edu.cn/handle/2XXMBERH/159121
专题	兰州理工大学
通讯作者	Gao, Kaixiong; Tao, Caihong
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China; 2.Lanzhou Jiaotong Univ, Sch Chem & Chem Engn, Lanzhou 730070, Peoples R China; 3.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing, Peoples R China; 4.AECC Beijing Inst Aeronaut Mat, Beijing, Peoples R China; 5.Lanzhou Univ Technol, Coll Petrochem Technol, Lanzhou, Peoples R China
推荐引用方式 GB/T 7714	Wen, Xinyu,Lai, Zhenguo,Zhang, Bin,et al. Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs[J]. Surface and Interface Analysis,2022,54(9):933-943.
APA	Wen, Xinyu.,Lai, Zhenguo.,Zhang, Bin.,Wang, Xin.,Wang, Yuan Yuan.,...&Tao, Caihong.(2022).Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs.Surface and Interface Analysis,54(9),933-943.
MLA	Wen, Xinyu,et al."Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs".Surface and Interface Analysis 54.9(2022):933-943.