Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining | |
Song, Xiaozong1; Niu, Yanjiang1; Gao, Gui2 | |
2022-09-05 | |
发表期刊 | Colloids and Surfaces A: Physicochemical and Engineering Aspects |
ISSN | 0927-7757 |
卷号 | 648 |
摘要 | Ultraviolet-induced nanoparticle colloid jet machining is a damage-free ultra-smooth surface polishing technology, which can realize atomic level material removal by utilizing the interface reaction between workpiece surface and nanoparticles in colloid jet beam under the catalysis of ultraviolet (UV) light. Due to the difference of chemical activity of atoms at different microstructures ("plane", "peak" and "valley" structure), the interfacial reaction degree between these atoms and nanoparticles in colloidal environment and the difficulty to remove those surface atoms are also different. To investigate the effects of surface microtopography on material removal and ultra-smooth surface creation processes in UV-induced nanoparticle colloid jet machining, first principle simulations of the interfacial reaction between the TiO2 nanoparticle and Si "plane", "peak" and "valley" structures have been done. Adsorption experiments and ultra-smooth surface polishing experiments were carried out to verify the rationality of the simulation results. The results indicate that the interface reaction between the "peak" structure and TiO2 nanoparticle is the most likely to occur, and the "valley" structure is the most difficult to occur. After the TiO2 nanoparticle being chemically bonded on the Si surface, the atoms on the "peak" structure are the easiest to be removed, and that of the "valley" structure are the most difficult to be removed. An ultra-smooth Si workpiece with surface roughness of Sq 0.49 nm has been obtained by UV-induced nanoparticle colloid jet machining. The power spectral density (PSD) results show that the Si workpiece has been gradually changed from a progressive surface to a fine surface, and has been smoothed in the wavelength range of 0.25–10 µm. © 2022 Elsevier B.V. |
关键词 | Atoms Landforms Polishing Silicon Spectral density Surface roughness TiO2 nanoparticles Creation process Jet machining Material removal Nanoparticle colloids Surface creation Surface microtopography Ultra smooth surface Ultra-smooth surface creation Ultraviolet-induced nanoparticle colloid jet machining Workpiece |
DOI | 10.1016/j.colsurfa.2022.129161 |
收录类别 | EI ; SCIE |
语种 | 英语 |
WOS研究方向 | Chemistry |
WOS类目 | Chemistry, Physical |
WOS记录号 | WOS:000804119500001 |
出版者 | Elsevier B.V. |
EI入藏号 | 20221912096544 |
EI主题词 | Titanium dioxide |
EI分类号 | 481.1 Geology ; 549.3 Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals ; 604.2 Machining Operations ; 761 Nanotechnology ; 804.2 Inorganic Compounds ; 931.2 Physical Properties of Gases, Liquids and Solids ; 931.3 Atomic and Molecular Physics |
来源库 | WOS |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | https://ir.lut.edu.cn/handle/2XXMBERH/158408 |
专题 | 机电工程学院 |
通讯作者 | Song, Xiaozong |
作者单位 | 1.Lanzhou Univ Technol, Sch Mech & Elect Engn, Lanzhou 730050, Peoples R China; 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
第一作者单位 | 兰州理工大学 |
通讯作者单位 | 兰州理工大学 |
第一作者的第一单位 | 兰州理工大学 |
推荐引用方式 GB/T 7714 | Song, Xiaozong,Niu, Yanjiang,Gao, Gui. Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects,2022,648. |
APA | Song, Xiaozong,Niu, Yanjiang,&Gao, Gui.(2022).Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining.Colloids and Surfaces A: Physicochemical and Engineering Aspects,648. |
MLA | Song, Xiaozong,et al."Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining".Colloids and Surfaces A: Physicochemical and Engineering Aspects 648(2022). |
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