Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining
Song, Xiaozong1; Niu, Yanjiang1; Gao, Gui2
2022-09-05
发表期刊Colloids and Surfaces A: Physicochemical and Engineering Aspects
ISSN0927-7757
卷号648
摘要Ultraviolet-induced nanoparticle colloid jet machining is a damage-free ultra-smooth surface polishing technology, which can realize atomic level material removal by utilizing the interface reaction between workpiece surface and nanoparticles in colloid jet beam under the catalysis of ultraviolet (UV) light. Due to the difference of chemical activity of atoms at different microstructures ("plane", "peak" and "valley" structure), the interfacial reaction degree between these atoms and nanoparticles in colloidal environment and the difficulty to remove those surface atoms are also different. To investigate the effects of surface microtopography on material removal and ultra-smooth surface creation processes in UV-induced nanoparticle colloid jet machining, first principle simulations of the interfacial reaction between the TiO2 nanoparticle and Si "plane", "peak" and "valley" structures have been done. Adsorption experiments and ultra-smooth surface polishing experiments were carried out to verify the rationality of the simulation results. The results indicate that the interface reaction between the "peak" structure and TiO2 nanoparticle is the most likely to occur, and the "valley" structure is the most difficult to occur. After the TiO2 nanoparticle being chemically bonded on the Si surface, the atoms on the "peak" structure are the easiest to be removed, and that of the "valley" structure are the most difficult to be removed. An ultra-smooth Si workpiece with surface roughness of Sq 0.49 nm has been obtained by UV-induced nanoparticle colloid jet machining. The power spectral density (PSD) results show that the Si workpiece has been gradually changed from a progressive surface to a fine surface, and has been smoothed in the wavelength range of 0.25–10 µm. © 2022 Elsevier B.V.
关键词Atoms Landforms Polishing Silicon Spectral density Surface roughness TiO2 nanoparticles Creation process Jet machining Material removal Nanoparticle colloids Surface creation Surface microtopography Ultra smooth surface Ultra-smooth surface creation Ultraviolet-induced nanoparticle colloid jet machining Workpiece
DOI10.1016/j.colsurfa.2022.129161
收录类别EI ; SCIE
语种英语
WOS研究方向Chemistry
WOS类目Chemistry, Physical
WOS记录号WOS:000804119500001
出版者Elsevier B.V.
EI入藏号20221912096544
EI主题词Titanium dioxide
EI分类号481.1 Geology ; 549.3 Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals ; 604.2 Machining Operations ; 761 Nanotechnology ; 804.2 Inorganic Compounds ; 931.2 Physical Properties of Gases, Liquids and Solids ; 931.3 Atomic and Molecular Physics
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被引频次:2[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符https://ir.lut.edu.cn/handle/2XXMBERH/158408
专题机电工程学院
通讯作者Song, Xiaozong
作者单位1.Lanzhou Univ Technol, Sch Mech & Elect Engn, Lanzhou 730050, Peoples R China;
2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
第一作者单位兰州理工大学
通讯作者单位兰州理工大学
第一作者的第一单位兰州理工大学
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Song, Xiaozong,Niu, Yanjiang,Gao, Gui. Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects,2022,648.
APA Song, Xiaozong,Niu, Yanjiang,&Gao, Gui.(2022).Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining.Colloids and Surfaces A: Physicochemical and Engineering Aspects,648.
MLA Song, Xiaozong,et al."Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining".Colloids and Surfaces A: Physicochemical and Engineering Aspects 648(2022).
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