Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls

doi:10.11933/j.issn.1007-9289.20180213001

IR > 学报编辑部

	Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls
	Fu Yu 1,2; Lu Yang 1; Yang Xiao-tian1 ; Wang Yong-fu 2; Zhang Jun-yan 2
	2018-08-01
发表期刊	CHINA SURFACE ENGINEERING
ISSN	1007-9289
卷号	31 期号:4 页码:113-121
摘要	Currently, hydrogenated carbon films containing the fullerene-like structures (FL-C:H) are mainly prepared on single-crystal Si substrates by plasma enhanced chemical vapor deposition (PECVD). In-situ plasma nitriding was additionally introduced prior to the PECVD process, to enhance the adhesion between the carbon films and steel substrates. The samples were prepared with different deposition times (30, 60, 90, 120, 150 and 180 min). Thickness, nanostructural evolution and tribological behavior of the coating were investigated. The results show that the FL-C: H film PECVD deposition process causes the temperature of the steel substrate to decrease as the deposition time increases (using a lower substrate bias than the extra in-situ nitriding process introduced), resulting in the structure transformation of the film. The films precent a graphite-like structure at the starting stage and gradually transform into a fullerene-like structure. The films deposited for 180 min exhibit super-low friction (0.009) and superlong wear life (53 000 cycles).
关键词	super-low friction hydrogenated carbon film graphite-like fullerene-like
DOI	10.11933/j.issn.1007-9289.20180213001
收录类别	ESCI
语种	中文
WOS研究方向	Materials Science
WOS类目	Materials Science, Coatings & Films
WOS记录号	WOS:000440623100011
出版者	CHINESE ASSOC SCIENCE & TECHNOLOGY-CAST
引用统计	无
文献类型	期刊论文
条目标识符	https://ir.lut.edu.cn/handle/2XXMBERH/155667
专题	学报编辑部
通讯作者	Zhang Jun-yan
作者单位	1.Lanzhou Univ Technol, Coll Mat & Engn, Lanzhou 730050, Gansu, Peoples R China; 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Gansu, Peoples R China
第一作者单位	兰州理工大学
第一作者的第一单位	兰州理工大学
推荐引用方式 GB/T 7714	Fu Yu,Lu Yang,Yang Xiao-tian,et al. Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls[J]. CHINA SURFACE ENGINEERING,2018,31(4):113-121.
APA	Fu Yu,Lu Yang,Yang Xiao-tian,Wang Yong-fu,&Zhang Jun-yan.(2018).Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls.CHINA SURFACE ENGINEERING,31(4),113-121.
MLA	Fu Yu,et al."Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls".CHINA SURFACE ENGINEERING 31.4(2018):113-121.