Institutional Repository of Coll Sci
| Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating | |
Wang, Xiangxian1 ; Ren, Yaqian1; Jia, Tianxu1; Su, Yingwen1; Qi, Yunping2; Wen, Xiaolei3
| |
| 2022-02-10 | |
| 发表期刊 | MODERN PHYSICS LETTERS B
 |
| ISSN | 0217-9849 |
| 卷号 | 36期号:4 |
| 摘要 | This paper presents a surface plasmon interference lithography technique based on the complementary grating, which comprises silicon gratings and complementary aluminum grating masks, for fabricating subwavelength structures. In this theoretical study, the optimal parameters of the complementary grating structure were determined using the reflectance spectrum. The optical field distributions of one- and two-dimensional subwavelength structures were obtained using the finite-difference time-domain method and rotation-related formulas. The results of numerical evaluations show that a one-dimensional periodic structure with a half-pitch resolution of 60.5 nm (approximately lambda/6.7) can be fabricated. In addition, subwavelength structures can be diversified using different rotation methods to expose the photolithography samples, such as square dot arrays and quasi-hexagonal closely packed structures. The proposed method combines surface plasmon interference with sample rotation, thereby enabling fabrication of abundant subwavelength structures. |
| 关键词 | Surface plasmon lithography complementary grating periodic pattern |
| DOI | 10.1142/S0217984921505539 |
| 收录类别 | SCIE |
| 语种 | 英语 |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical |
| WOS记录号 | WOS:000753697600010 |
| 出版者 | WORLD SCIENTIFIC PUBL CO PTE LTD |
| 来源库 | WOS |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | https://ir.lut.edu.cn/handle/2XXMBERH/154794 |
| 专题 | 理学院 |
| 通讯作者 | Wang, Xiangxian |
| 作者单位 | 1.Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China; 2.Northwest Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China; 3.Univ Sci & Technol China, Ctr Micro & Nanoscale Res & Fabricat, Hefei 230026, Peoples R China |
| 第一作者单位 | 理学院 |
| 通讯作者单位 | 理学院 |
| 第一作者的第一单位 | 理学院 |
| 推荐引用方式 GB/T 7714 | Wang, Xiangxian,Ren, Yaqian,Jia, Tianxu,et al. Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating[J]. MODERN PHYSICS LETTERS B,2022,36(4). |
| APA | Wang, Xiangxian,Ren, Yaqian,Jia, Tianxu,Su, Yingwen,Qi, Yunping,&Wen, Xiaolei.(2022).Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating.MODERN PHYSICS LETTERS B,36(4). |
| MLA | Wang, Xiangxian,et al."Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating".MODERN PHYSICS LETTERS B 36.4(2022). |
| 条目包含的文件 | 下载所有文件 | |||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| Wang-2022-Theoretica（1844KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论