Lanzhou University of Technology Institutional Repository (LUT_IR)
Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique | |
Cui, Jinfeng2![]() ![]() | |
2012-04-01 | |
发表期刊 | Applied Surface Science
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ISSN | 01694332 |
卷号 | 258期号:12页码:5025-5030 |
摘要 | Ti-doped diamond-like carbon (DLC) films were deposited on Si substrates at room temperature by magnetron sputtering Ti twin-target in methane and argon mixture atmosphere. The DLC films with different Ti concentrations were fabricated by varying the gas flow ratio of Ar/CH4. X-ray photoelectron spectroscopy (XPS), Raman spectra were used to analyze the composition and the microstructure of the films. The internal stress was calculated by using the Stoney equation, where the curvature of the film/substrate was measured by BGS 6341 type film stress tester. The mechanical and tribological properties of the films were systematically studied by the nano-indentor and reciprocating ball-on-disc tester, respectively. The Ti atomic concentration in the films increased from 0.41% to 8.2% as the Ar/CH 4 flow ratio increased from 60/190 to 140/110. The Ti atoms exist mainly in the form of metallic-like Ti rather than TiC when Ti concentration is 0.41%, confirmed by XPS analysis. As the Ti concentration rose to 6.7%, the Ti-DLC films transformed to composite DLC films with carbide phase embedded in the DLC matrix because of the formation of TiC. As a result, the hardness is decreased, while the stress is dramatically increased. The Ti-DLC films with 0.41% Ti doping showed a relatively high hardness (13.75 GPa), low stress (0.56 GPa), extremely low wear rate (∼10-10 mm3/Nm) and low friction coefficient (0.05). © 2011 Elsevier B.V. All rights reserved. |
关键词 | Carbides Carbon films Composite films Flow of gases Friction Hardness Magnetron sputtering Mechanical properties Photoelectron spectroscopy Semiconductor doping Titanium carbide Tribology X ray photoelectron spectroscopy Atomic concentration Concentration rose Gas-flow ratio Low friction coefficients Mechanical and tribological properties Stoney equation Ti doping Tribological performance |
DOI | 10.1016/j.apsusc.2012.01.072 |
收录类别 | EI ; SCIE |
语种 | 英语 |
WOS研究方向 | Chemistry ; Materials Science ; Physics |
WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
WOS记录号 | WOS:000301002600005 |
出版者 | Elsevier B.V. |
EI入藏号 | 20121114851956 |
EI主题词 | Diamond like carbon films |
EI分类号 | 631.1.2 Gas Dynamics ; 712.1 Semiconducting Materials ; 804.2 Inorganic Compounds ; 813.2 Coating Materials ; 931 Classical Physics ; Quantum Theory ; Relativity ; 951 Materials Science |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | https://ir.lut.edu.cn/handle/2XXMBERH/150147 |
专题 | 实验室建设与管理处 石油化工学院 |
通讯作者 | Zhang, Junyan |
作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China; 2.Lanzhou Univ Technol, Sch Petr Chem Engn, Lanzhou 730050, Peoples R China |
第一作者单位 | 兰州理工大学 |
第一作者的第一单位 | 兰州理工大学 |
推荐引用方式 GB/T 7714 | Cui, Jinfeng,Qiang, Li,Zhang, Bin,et al. Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique[J]. Applied Surface Science,2012,258(12):5025-5030. |
APA | Cui, Jinfeng,Qiang, Li,Zhang, Bin,Ling, Xiao,Yang, Tao,&Zhang, Junyan.(2012).Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique.Applied Surface Science,258(12),5025-5030. |
MLA | Cui, Jinfeng,et al."Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique".Applied Surface Science 258.12(2012):5025-5030. |
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