Institutional Repository of Coll Sci
| Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations | |
Wang, Xiangxian1 ; Jia, Tianxu1; Zhu, Jiankai1; Su, Yingwen1; Zhang, Liping1; Yang, Hua1; Yi, Zao2; Qi, Yunping3
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| 2021-11-20 | |
| 发表期刊 | MODERN PHYSICS LETTERS B
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| ISSN | 0217-9849 |
| 卷号 | 35期号:32 |
| 摘要 | In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry. |
| 关键词 | Laser interference lithography polarization periodic pattern |
| DOI | 10.1142/S0217984921504595 |
| 收录类别 | SCIE |
| 语种 | 英语 |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical |
| WOS记录号 | WOS:000713305600001 |
| 出版者 | WORLD SCIENTIFIC PUBL CO PTE LTD |
| 来源库 | WOS |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | https://ir.lut.edu.cn/handle/2XXMBERH/149968 |
| 专题 | 理学院 |
| 通讯作者 | Wang, Xiangxian |
| 作者单位 | 1.Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China; 2.Southwest Univ Sci & Technol, Joint Lab Extreme Condit Matter Properties, Mianyang 621010, Sichuan, Peoples R China; 3.Northwest Normal Univ, Coll Phys & Elect Engn, Lanzhou 730070, Peoples R China |
| 第一作者单位 | 理学院 |
| 通讯作者单位 | 理学院 |
| 第一作者的第一单位 | 理学院 |
| 推荐引用方式 GB/T 7714 | Wang, Xiangxian,Jia, Tianxu,Zhu, Jiankai,et al. Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations[J]. MODERN PHYSICS LETTERS B,2021,35(32). |
| APA | Wang, Xiangxian.,Jia, Tianxu.,Zhu, Jiankai.,Su, Yingwen.,Zhang, Liping.,...&Qi, Yunping.(2021).Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations.MODERN PHYSICS LETTERS B,35(32). |
| MLA | Wang, Xiangxian,et al."Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations".MODERN PHYSICS LETTERS B 35.32(2021). |
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| Wang-2021-Theoretica（1169KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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