Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide

doi:10.3788/CJL201744.0402001

	Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide
	Yan, Xiaodong 1; Ren, Ni 2; Tang, Fuling1 ; Xue, Hongtao1 ; Zhang, Hongwei 1; Yang, Jianping 2; Liu, Xiaoli 2
	2017-04-10
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
ISSN	02587025
卷号	44 期号:4
摘要	In order to study the laws of single- or double-layer metal/polyimide etched by movable pulse lasers, one general model of movable nanosecond pulse laser etching is built with the finite element method. The influence of laser movement speed on etching depth is discussed, and the law of temperature change of the metal Al thin films and double-layer metal thin films etched by movable pulse laser is analyzed. The results show that, with a certain movement speed, the etching depth increases at the beginning, then the increase rate slows down, and the etching depth approaches to one constant maximum value. The temperature change at the interface between the metal and the substrate material lags behind that of the metal thin film close to laser source, and the substrate temperature rises continually after turning off the laser. As for double-layer metal films, the choice of thicker bottom layer with a high thermal conductivity is helpful to protect the polyimide substrate. © 2017, Chinese Lasers Press. All right reserved.
关键词	Etching Metals Polyimides Temperature distribution Thermal conductivity Aluminum thin films Etching depth Laser technique Movement speed Pulse laser
DOI	10.3788/CJL201744.0402001
收录类别	EI
语种	中文
出版者	Science Press
EI入藏号	20173504092819
EI主题词	Thin films
EI分类号	641.1 Thermodynamics - 802.2 Chemical Reactions - 815.1.1 Organic Polymers
来源库	Compendex
分类代码	641.1 Thermodynamics - 802.2 Chemical Reactions - 815.1.1 Organic Polymers
引用统计	无
文献类型	期刊论文
条目标识符	https://ir.lut.edu.cn/handle/2XXMBERH/114545
专题	材料科学与工程学院省部共建有色金属先进加工与再利用国家重点实验室
作者单位	1.School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou; Gansu; 730050, China; 2.Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou; Gansu; 730000, China
第一作者单位	材料科学与工程学院
第一作者的第一单位	材料科学与工程学院
推荐引用方式 GB/T 7714	Yan, Xiaodong,Ren, Ni,Tang, Fuling,et al. Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2017,44(4).
APA	Yan, Xiaodong.,Ren, Ni.,Tang, Fuling.,Xue, Hongtao.,Zhang, Hongwei.,...&Liu, Xiaoli.(2017).Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide.Zhongguo Jiguang/Chinese Journal of Lasers,44(4).
MLA	Yan, Xiaodong,et al."Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide".Zhongguo Jiguang/Chinese Journal of Lasers 44.4(2017).