Influence of working pressure on structure and properties of diamond-like carbon films

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	Influence of working pressure on structure and properties of diamond-like carbon films
	Ling, Xiao1,2 ; Yu, Shurong 1; Zhang, Junyan 2
	2014-06-01
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
ISSN	10072276
卷号	43 期号:6 页码:1878-1882
摘要	The diamond-like carbon (DLC) films were prepared by plasma-enhanced chemical vapor deposition (PECVD) with CH4 as the gas at different working pressure, on substrates of 316L stainless steel. The microstructures and properties of the films were characterized with Raman spectroscopy, scanning electron microscopy, nano-indenter and tribo-test. With the increase of working pressure from 7 Pa to 15 Pa, the sp3 content and mechanical properties of the films increased and the tribological properties decreased obviously. However, with the increase of working pressure from 15 Pa to 31 Pa, the sp3 content and mechanical properties of the films decreased and the tribological properties increased obviously.
关键词	Carbon films Diamonds Mechanical properties Plasma CVD Plasma enhanced chemical vapor deposition Scanning electron microscopy Structure (composition) Tribology 316 L stainless steel Diamond like carbon Microstructures and properties Plasma enhanced chemical vapor depositions (PE CVD) Properties Structure and properties Tribological properties Working pressures
收录类别	EI
语种	中文
出版者	Chinese Society of Astronautics
EI入藏号	20142917960082
EI主题词	Diamond like carbon films
EI分类号	482.2.1 Gems - 802.2 Chemical Reactions - 804.2 Inorganic Compounds - 813.1 Coating Techniques - 813.2 Coating Materials - 931 Classical Physics ; Quantum Theory ; Relativity - 951 Materials Science
来源库	Compendex
分类代码	482.2.1 Gems - 802.2 Chemical Reactions - 804.2 Inorganic Compounds - 813.1 Coating Techniques - 813.2 Coating Materials - 931 Classical Physics; Quantum Theory; Relativity - 951 Materials Science
文献类型	期刊论文
条目标识符	https://ir.lut.edu.cn/handle/2XXMBERH/113573
专题	石油化工学院
作者单位	1.School of Petrochemical Technology, Lanzhou University of Technology, Lanzhou 730050, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China
第一作者单位	兰州理工大学
第一作者的第一单位	兰州理工大学
推荐引用方式 GB/T 7714	Ling, Xiao,Yu, Shurong,Zhang, Junyan. Influence of working pressure on structure and properties of diamond-like carbon films[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2014,43(6):1878-1882.
APA	Ling, Xiao,Yu, Shurong,&Zhang, Junyan.(2014).Influence of working pressure on structure and properties of diamond-like carbon films.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,43(6),1878-1882.
MLA	Ling, Xiao,et al."Influence of working pressure on structure and properties of diamond-like carbon films".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 43.6(2014):1878-1882.