Study on tribological behavior of Al/AlN multilayers

	Study on tribological behavior of Al/AlN multilayers
	Zhang, Guang-An 1; Wu, Zhi-Guo 1,2; Wang, Ming-Xu 1; Fan, Xiao-Yan 1; Wang, Jun 1; Yan, Peng-Xun 1,3
	2007-05-01
发表期刊	Mocaxue Xuebao/Tribology
ISSN	10040595
卷号	27 期号:3 页码:204-209
摘要	Al/AlN multilayers were prepared by cylindrical DC magnetron sputtering method. The hardness of the Al/AlN multilayer films was determined using a nano-indentation tester. The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode. The tribological properties of the Al/AlN multilayers showed obvious enhancement in the Al/AlN layer thickness ratio of 2.9/1.1 compared to the thick AlN layer in modulation period. With the same Al/AlN layer thickness ratio but varying modulation period, the film exhibited low friction coefficient, but it also exhibited poor tribological performance at high load due to its low hardness.
关键词	Aluminum Bond strength (materials) Friction Hardness Magnetron sputtering Nanoindentation Nitrides Wear resistance Aluminum nitride Tribological properties Wear properties
收录类别	EI
语种	中文
出版者	Science Press, 18,Shuangqing Street,Haidian, Beijing, 100085, China
EI入藏号	20072810698094
EI主题词	Multilayer films
EI分类号	421 Strength of Building Materials ; Mechanical Properties - 541.1 Aluminum - 812.1 Ceramics - 813.2 Coating Materials - 931.2 Physical Properties of Gases, Liquids and Solids
来源库	Compendex
分类代码	421 Strength of Building Materials; Mechanical Properties - 541.1 Aluminum - 812.1 Ceramics - 813.2 Coating Materials - 931.2 Physical Properties of Gases, Liquids and Solids
文献类型	期刊论文
条目标识符	https://ir.lut.edu.cn/handle/2XXMBERH/112169
专题	兰州理工大学
作者单位	1.Institute for Plasma and Metal Materials, Lanzhou University, Lanzhou 730000, China; 2.State Key Laboratory of New Nonferrous Metal Materials, Lanzhou University of Technology, Lanzhou 730050, China; 3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
推荐引用方式 GB/T 7714	Zhang, Guang-An,Wu, Zhi-Guo,Wang, Ming-Xu,et al. Study on tribological behavior of Al/AlN multilayers[J]. Mocaxue Xuebao/Tribology,2007,27(3):204-209.
APA	Zhang, Guang-An,Wu, Zhi-Guo,Wang, Ming-Xu,Fan, Xiao-Yan,Wang, Jun,&Yan, Peng-Xun.(2007).Study on tribological behavior of Al/AlN multilayers.Mocaxue Xuebao/Tribology,27(3),204-209.
MLA	Zhang, Guang-An,et al."Study on tribological behavior of Al/AlN multilayers".Mocaxue Xuebao/Tribology 27.3(2007):204-209.