核/壳微结构氮化硅陶瓷线圈超弹性动力学理论与实验研究
Project Number51402142
卢学峰
Abstract随着微电子行业的飞速发展,基础器件的特征尺寸在不断缩小,而传统脆性陶瓷不能满足其使用要求,成为制约该技术发展的瓶颈,寻求超弹性陶瓷是解决此问题的有效途径之一。基于此,本项目通过理论与实验相结合的方法对核/壳微结构氮化硅陶瓷线圈的超弹性进行基础科学研究。理论计算与分析微结构中核、壳两部分的特征尺寸和界面结合态及其对线圈超弹性行为的影响规律,研究完全和部分加载循环下不同超弹性行为特征与差异,建立合理的弹性势能表达式和超弹性动力学理论模型;实验研究核/壳微结构氮化硅线圈超弹性,并对理论研究中提出的弹性势能表达式和超弹性动力学理论模型进行验证和修正,在对各种影响因素及相关性理论总结的基础上建立准确的核/壳微结构氮化硅陶瓷超弹性动力学理论及定量预测模型。本项目旨在澄清核/壳微结构氮化硅陶瓷超弹性成因及力学行为机制,为制备超弹性陶瓷及研制出新一代微电子基础器件奠定理论和技术基础。【英文摘要】Withtherapiddevelopmentofthemicroelectronicsindustry,thefeaturesizeofbasicdeviceisbecomingsmaller.Thebrittlenessoftraditionalceramicscannotmeettheoperatingrequirementandthisisthegreatestdrawbackinmakingtheceramicsavailableasengineeringmaterials.Itisaneffectivewayofquestingceramicswithexcellentsuperelasticproperty.Basedonit,weconductthestudyonsuperelasticdynamicstheoryandexperimentofsiliconnitridewithcore/shellmicrostructure.Thefeaturesizeandinterfacialbondingstatusofbothcoreandshellparts,aswellastheeffectsonthesuperelasticitybehavior,arestudiedbycalculatingandanalyzingresultstoestablishanaccurateexpressionofelasticpotentialenergy.Thesuperelasticitybehaviorcharacteristicsanddifferencesunderfullandpartialloadcyclesareanalyzedinordertoobtainthereasonabletheoreticalmodelsofsuperelasticdynamics.Thesuperelasticpropertyofsiliconnitrideisinvestigatedexperimentallyforthepurposeofemphaticallyverifyingandcorrectingtheelasticpotentialenergyexpressionsandsuperelasticdynamicsmodelsputforwardintheoreticalstudy.Thesuperelasticdynamicstheoryandquantitativeforecastingmodelsofsiliconnitridewithcore/shellmicrostructureisaccuratelyestablishedonthebasisofsummarizingvariousfactorsandrelationshipsbetweeneachother.Theobjectiveofthepresentstudyistoclarifythesuperelasticityreasonandbehaviormechanismofsiliconnitridewithcore/shellmicrostructure,andtoprovidethetheoreticalandtechnicalfoundationforpreparingthesuperelasticityceramicsandanewgenerationofmicroelectronicdevices.
Subtype青年科学基金项目
Project Source国家自然科学基金
2015-01
End Date2017-12
MOST Discipline Catalogue10 - 材料科学 ; 1002 - 无机非金属材料
Host Institution兰州理工大学
Project Funding250000.0
CountryCN
Language中文
Document Type项目
Identifierhttp://ir.lut.edu.cn/handle/2XXMBERH/64752
Collection材料科学与工程学院
Recommended Citation
GB/T 7714
卢学峰.核/壳微结构氮化硅陶瓷线圈超弹性动力学理论与实验研究.2015.
Files in This Item:
There are no files associated with this item.
Related Services
Usage statistics
Google Scholar
Similar articles in Google Scholar
[卢学峰]'s Articles
Baidu academic
Similar articles in Baidu academic
[卢学峰]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[卢学峰]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.