晶圆和磨削垫在化学机械抛光中多尺度表面拓扑形状的演化规律及应用研究
Project Number61564006
吴黎晓
Subtype地区科学基金项目
Project Source国家自然科学基金
2016-01
End Date2019-12
MOST Discipline Catalogue12 - 信息科学 ; 1204 - 半导体科学与信息器件
Host Institution兰州理工大学
Project Funding420000.0
CountryCN
Language中文
Document Type项目
Identifierhttp://ir.lut.edu.cn/handle/2XXMBERH/64645
Collection机电工程学院
Recommended Citation
GB/T 7714
吴黎晓.晶圆和磨削垫在化学机械抛光中多尺度表面拓扑形状的演化规律及应用研究.2016.
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