Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining

doi:10.3390/ma14051070

IR > 机电工程学院

	Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining
	Song, Xiaozong; Ge, Shundong; Wang, Xiaorong; Liu, Shengkai
	2021-03
发表期刊	Materials
卷号	14 期号:5 页码:1-15
摘要	In this paper, ultraviolet (UV)induced nanoparticle colloid jet machining is proposed to achieve ultrasmooth surface polishing by using the interaction between nanoparticles and the workpiece surface under the action of the ultraviolet field and the hydrodynamic pressure field. In the process of UVinduced nanoparticle colloid jet machining, the effects of photocatalysis on the interaction between nanoparticles and the workpiece surface need to be further studied in order to better understand the polishing process. This paper presents the interaction between TiO2 nanoparticles and a Si workpiece surface with and without ultraviolet irradiation. Scanning electron microscopy (SEM), Fouriertransform infrared spectroscopy (FTIR), and Xray photoelectron spectroscopy (XPS) were applied to investigate the differences in the interaction of TiO2 nanoparticles with Si workpieces. The SEM and XPS results indicate that the photocatalysis of UV light can promote the interaction between TiO2 nanoparticles and a Si surface by creating more interfacial reaction active centers between the TiO2 nanoparticles and the Si workpiece. The FTIR and XPS spectra show that TiO2 nanoparticles are chemically bonded to the Si workpiece by oxygen-bridging atoms in TiOSi bonds. Due to the effects of photocatalysis, UVinduced nanoparticle colloid jet machining has a higher polishing efficiency than nanoparticle colloid jet machining with the same polishing parameters. © 2021 by the authors. Licensee MDPI, Basel, Switzerland.
关键词	Infrared spectroscopy Irradiation Nanoparticles Oxide minerals Photocatalysis Photoelectron spectroscopy Polishing Scanning electron microscopy Silicon Titanium dioxide X ray photoelectron spectroscopy Experimental investigations Hydrodynamic pressure Nanoparticle colloids Photoelectron spectroscopy (XPS) Polishing efficiency Polishing parameters Transform infrared spectroscopy Ultraviolet irradiations
DOI	10.3390/ma14051070
收录类别	EI ; SCIE
语种	英语
WOS研究方向	Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering ; Physics
WOS类目	Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering ; Physics, Applied ; Physics, Condensed Matter
WOS记录号	WOS:000628380500001
出版者	MDPI AG
EI入藏号	20211210115141
EI主题词	TiO2 nanoparticles
EI分类号	482.2 Minerals ; 549.3 Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals ; 604.2 Machining Operations ; 741.1 Light/Optics ; 761 Nanotechnology ; 804.2 Inorganic Compounds ; 933 Solid State Physics
来源库	WOS
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	https://ir.lut.edu.cn/handle/2XXMBERH/148461
专题	机电工程学院
通讯作者	Song, Xiaozong
作者单位	Lanzhou Univ Technol, Sch Mech & Elect Engn, Lanzhou 730050, Peoples R China
第一作者单位	兰州理工大学
通讯作者单位	兰州理工大学
第一作者的第一单位	兰州理工大学
推荐引用方式 GB/T 7714	Song, Xiaozong,Ge, Shundong,Wang, Xiaorong,et al. Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining[J]. Materials,2021,14(5):1-15.
APA	Song, Xiaozong,Ge, Shundong,Wang, Xiaorong,&Liu, Shengkai.(2021).Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining.Materials,14(5),1-15.
MLA	Song, Xiaozong,et al."Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining".Materials 14.5(2021):1-15.