Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining
Song, Xiaozong; Ge, Shundong; Wang, Xiaorong; Liu, Shengkai
2021-03-01
Source PublicationMaterials
Volume14Issue:5Pages:1-15
AbstractIn this paper, ultraviolet (UV)induced nanoparticle colloid jet machining is proposed to achieve ultrasmooth surface polishing by using the interaction between nanoparticles and the workpiece surface under the action of the ultraviolet field and the hydrodynamic pressure field. In the process of UVinduced nanoparticle colloid jet machining, the effects of photocatalysis on the interaction between nanoparticles and the workpiece surface need to be further studied in order to better understand the polishing process. This paper presents the interaction between TiO2 nanoparticles and a Si workpiece surface with and without ultraviolet irradiation. Scanning electron microscopy (SEM), Fouriertransform infrared spectroscopy (FTIR), and Xray photoelectron spectroscopy (XPS) were applied to investigate the differences in the interaction of TiO2 nanoparticles with Si workpieces. The SEM and XPS results indicate that the photocatalysis of UV light can promote the interaction between TiO2 nanoparticles and a Si surface by creating more interfacial reaction active centers between the TiO2 nanoparticles and the Si workpiece. The FTIR and XPS spectra show that TiO2 nanoparticles are chemically bonded to the Si workpiece by oxygen-bridging atoms in TiOSi bonds. Due to the effects of photocatalysis, UVinduced nanoparticle colloid jet machining has a higher polishing efficiency than nanoparticle colloid jet machining with the same polishing parameters. © 2021 by the authors. Licensee MDPI, Basel, Switzerland.
KeywordInfrared spectroscopy Irradiation Nanoparticles Oxide minerals Photocatalysis Photoelectron spectroscopy Polishing Scanning electron microscopy Silicon Titanium dioxide X ray photoelectron spectroscopy Experimental investigations Hydrodynamic pressure Nanoparticle colloids Photoelectron spectroscopy (XPS) Polishing efficiency Polishing parameters Transform infrared spectroscopy Ultraviolet irradiations
DOI10.3390/ma14051070
Indexed ByEI
Language英语
PublisherMDPI AG
EI Accession Number20211210115141
EI KeywordsTiO2 nanoparticles
EI Classification Number482.2 Minerals ; 549.3 Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals ; 604.2 Machining Operations ; 741.1 Light/Optics ; 761 Nanotechnology ; 804.2 Inorganic Compounds ; 933 Solid State Physics
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Document Type期刊论文
Identifierhttp://ir.lut.edu.cn/handle/2XXMBERH/148461
Collection机电工程学院
AffiliationSchool of Mechanical and Electronical Engineering, Lanzhou University of Technology, Lanzhou; 730050, China
First Author AffilicationLanzhou University of Technology
First Signature AffilicationLanzhou University of Technology
Recommended Citation
GB/T 7714
Song, Xiaozong,Ge, Shundong,Wang, Xiaorong,et al. Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining[J]. Materials,2021,14(5):1-15.
APA Song, Xiaozong,Ge, Shundong,Wang, Xiaorong,&Liu, Shengkai.(2021).Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining.Materials,14(5),1-15.
MLA Song, Xiaozong,et al."Experimental investigation on the effects of photocatalysis in ultravioletinduced nanoparticle colloid jet machining".Materials 14.5(2021):1-15.
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